SGT MOSFET device scheme
A. Optimized protocell structure with the lowest epitaxial resistivity to obtain very low Rsp;
B. Adopt the self-alignment process design technology and the upper and lower structure of the primitive cell to obtain a high density of 645M/ INCH2, so as to obtain a very low Rsp;
C. Adopt advanced DFN package for better heat dissipation performance and on-resistance